Angular velocity sensor

ABSTRACT

The present invention aims to present an angular velocity sensor having a self diagnosis function.  
     An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is a Continuation-In-Part of U.S. patentapplication Ser. No. 09/332,162 filed on Jun. 14, 1999, which is aDivisional of U.S. patent application No. 08/776,443, filed on Apr.17,1997.

FIELD OF THE INVENTION

[0002] The present invention relates to an angular velocity sensorhaving a self diagnosis function.

BACKGROUND OF THE INVENTION

[0003] A conventional tuning fork type angular velocity sensor has adetecting part comprising detector plates 13 and 14 and a driving partcomprising driver plates 11 and 12. As shown in FIG. 19, detector plates13 and 14 are located at the top of the driver plates 11 and 12,respectively. Each detector plate 13 and 14 is joined orthogonally to arespective driver plate 13 and 14. When an angular velocity is appliedto the angular velocity sensor and while keeping the driving part incontinuous tuning fork vibration, the angular velocity is detected bythe output of the detector plates 13 and 14, which vibrate in oppositedirections to each other corresponding to the applied angular velocity.

[0004] In an angular velocity sensor in accordance with the prior art, atightly sealed space is formed by a lid 2, which is made of resin. Lid 2is attached at an aperture of a case 1, also made of resin, of which oneend is open, as shown in FIG. 18.

[0005] Inside the tightly sealed space, a circuit board 3 and a metallicweight plate 4 are contained. Supporting pins 5 are attached at fourcorners inside the case 1, and weight plate 4 and circuit board 3 areelastically supported and fixed by the supporting pins 5. Dampers 6 madeof rubber are attached at the four corners of weight plate 4 for theelastic support. Supporting legs 7 made of resin are put between damper6 and circuit board 3. Supporting pins 5 are compressed at the tipstoward the circuit board 3 side after penetrating dampers 6, supportinglegs 7 and circuit board 3. Thus, circuit board 3 and weight plate 4 areelastically supported and fixed. A metallic supporting pin 8 is insertedand fixed vertically to weight plate 4, on the circuit board 3 side, asshown in FIG. 19. One end of a metallic supporting pin 9, laid parallelto weight plate 4, is inserted and fixed to supporting pin 8. Thediameter of supporting pin 9 is about one fifth of the diameter ofsupporting pin 8. Furthermore supporting pin 9 is made of metallicmaterial having elasticity, such as a piano wire, wherein the other endof supporting pin 9 is fixed to a metal plate 10 by soldering.

[0006] One end of each of metallic driver plates 11 and 12, which aresandwiching supporting pins 8 and 9 therebetween, is fixed to each sideof metal plate 10. Plate-shaped piezoelectric elements 11 a and 12 a arefixed on the surfaces of metallic driver plates 11 and 12, respectively.In this way, the tuning fork type driving part is formed. The other endsof driver plates 11 and 12 are twisted orthogonally relative topiezoelectric elements 11 a and 12 a to form detector plates 13 and 14.Other plate-shaped piezoelectric elements 13 a and 14 a are fixed ondetector plates 13 and 14, as shown in FIG. 19. In this way, thedetecting part is formed. The angular velocity sensor is composed of thedriving part and the detecting part.

[0007] There is a problem with the conventional angular velocity sensorhowever. Namely, the conventional sensor has no ability to detectinformation about the occurrence of a malfunction of the components, northe ability to send such information, judged to be a malfunction of thecomponents, to the outside (e.g., such that an operator can be notifiedof the malfunction).

[0008] The present invention provides a sensor that allows detectionfrom outside the sensor of a malfunction in the sensor, resulting frompartial damage to the sensor, that prevents the sensor from performingaccurate angular velocity detection. Accordingly, the present inventionprovides a highly reliable angular velocity sensor.

SUMMARY OF THE INVENTION

[0009] To achieve the stated purpose, an angular velocity sensor of thepresent invention includes (1) a sensor element having a driver part anda detector part for detecting an angular velocity, (2) drive meansincluding a driver circuit for supplying a driving signal to the drivingpart of the sensor element and a monitor circuit to which a monitorsignal is supplied from the sensor element and stably driving andvibrating the driver part of the sensor element by applying the outputof the monitor circuit to the driver circuit through an AGC (automaticgain control) circuit, (3) detection means including a chargingamplifier to which an output of the detector part of the sensor elementis supplied and a synchronous detector to which an output of thecharging amplifier is supplied through a band pass filter and detectingan output of the band pass filter synchronizing with a driving signalfrom the drive means and outputting an angular velocity signal, and (4)self diagnosis means receiving a mechanical coupling signal obtainedfrom the detection means other than an angular velocity signal,detecting abnormality of the sensor element and outputting a selfdiagnosis signal.

[0010] Also, an angular velocity sensor according to another aspect ofthe present invention includes, (1) a sensor element with a vibratingpart and detector part for detecting an angular velocity, (2) drivemeans including a driver circuit and a monitor circuit similar to thatmentioned above, (3) detection means including a pair of currentamplifiers, a differential amplifier and a synchronous demodulator, inwhich the pair of current amplifiers receive outputs from the detectorpart of said sensor element, the differential amplifier amplifies adifference in outputs from the pair of current amplifiers and in whichthe synchronous demodulator detects an output from the differentialamplifier in synchronous with the driving signal from the drive meansand outputs an angular velocity signal, and (4) self diagnosis means foroutputting a diagnosis signal to detect an abnormality of the sensorelement by coupling a signal synchronized with the driving signal to thesynchronous demodulator.

[0011] According to the above composition, by making the mechanicalcoupling signal always obtained from the detection means as a signal forself diagnosis, whether the angular velocity signal is in a state to bedetected normally or not can be easily checked. Also as the mechanicalcoupling signal is always generated, it is unnecessary to independentlyprovide means for generating the mechanical coupling signal.Accordingly, not only is the composition very simple and highly reliablefor self diagnosis, but it also makes it possible to know when thecharacteristics of the sensor become stable after the sensor starts towork so that sensor output information can be utilized at its earliestpossible time.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012]FIG. 1 is a block diagram of an angular velocity sensor inaccordance with a first exemplary embodiment of the present invention.

[0013]FIG. 2 shows waveforms at various points of the angular velocitysensor of FIG. 1.

[0014]FIG. 3 is a block diagram of an angular velocity sensor inaccordance with a second exemplary embodiment of the present invention.

[0015]FIG. 4 shows waveforms at various points of the angular velocitysensor of FIG. 3.

[0016]FIG. 5 is a block diagram of an angular velocity sensor inaccordance with a third exemplary embodiment of the present invention.

[0017]FIG. 6 shows waveforms at various points of the angular velocitysensor of FIG. 5.

[0018]FIG. 7 is a block diagram of an angular velocity sensor inaccordance with a fourth exemplary embodiment of the present invention.

[0019]FIG. 8 shows waveforms at various points of the angular velocitysensor of FIG. 7.

[0020]FIG. 9 is a block diagram of an angular velocity sensor inaccordance with a fifth exemplary embodiment of the present invention.

[0021]FIG. 10 shows waveforms at various points of the angular velocitysensor of FIG. 9.

[0022]FIG. 11(a) is an expanded squint view of an essential part of theangular velocity sensor of FIG. 9.

[0023]FIG. 11(b) is a cross sectional view of the essential part of theangular velocity sensor of FIG. 9.

[0024]FIG. 11(c) is an equivalent circuit diagram of the angularvelocity sensor of FIG. 9.

[0025]FIG. 12 is a circuit diagram showing a circuit configuration ofthe principal part of the angular velocity sensor of FIG. 9.

[0026]FIG. 13 is a block diagram of an angular velocity sensor inaccordance with a sixth exemplary embodiment of the present invention.

[0027]FIG. 14 is a circuit diagram of the essential part of the angularvelocity sensor of FIG. 13.

[0028]FIG. 15 shows waveforms at various points of the angular velocitysensor of FIG. 13.

[0029]FIG. 16 is a block diagram of an angular velocity sensor inaccordance with a seventh exemplary embodiment of the present invention.

[0030]FIG. 17 shows waveforms at various points of the angular velocitysensor of FIG. 16.

[0031]FIG. 18 is a squint view for assembling an essential part of anangular velocity sensor in accordance with the prior art.

[0032]FIG. 19 is an expanded squint view of an essential part of theprior art angular velocity sensor of FIG. 18.

[0033]FIG. 20(a) is a circuit diagram of an angular velocity sensor inaccordance with an eighth exemplary embodiment of the present invention.

[0034]FIG. 20(b) shows a cross-sectional view of the angular velocitysensor of FIG. 20(a) taken across W-W.

[0035]FIG. 20(c) shows a detailed current distribution in the W-Wcross-section of FIG. 20(b).

[0036]FIG. 21 shows waveforms at various points of the angular velocitysensor of FIG. 20(a).

[0037]FIG. 22 is a circuit diagram of an angular velocity sensor inaccordance with a ninth exemplary embodiment of the present invention.

[0038]FIG. 23 shows waveforms at various points of the angular velocitysensor of FIG. 22.

[0039]FIG. 24 is a circuit diagram of an angular velocity sensor inaccordance with a tenth exemplary embodiment of the present invention.

[0040]FIG. 25 shows waveforms at various points of the angular velocitysensor of FIG. 24.

[0041]FIG. 26(a) is a circuit diagram of an angular velocity sensor inaccordance with an eleventh exemplary embodiment of the presentinvention.

[0042]FIG. 26(b) shows a detailed current distribution in the W-Wcross-section illustrated in FIG. 26(a).

[0043]FIG. 27 shows waveforms at various points of the angular velocitysensor of FIG. 26(a).

[0044]FIG. 28(a) is a circuit diagram of an angular velocity sensor inaccordance with a twelfth exemplary embodiment of the present invention.

[0045]FIG. 28(b) shows a cross-sectional view of the angular velocitysensor of FIG. 28(a) taken across W-W.

[0046]FIG. 29(a) shows waveforms at various points of the angularvelocity sensor of FIG. 28(a) before an adjusting operation.

[0047]FIG. 29(b) shows waveforms at various points of the angularvelocity sensor of FIG. 28(a) during an adjusting operation.

[0048]FIG. 29(c) shows waveforms at various points of the angularvelocity sensor of FIG. 28(a) after an adjusting operation.

[0049]FIG. 30 is a circuit diagram of an angular velocity sensor inaccordance with a thirteenth exemplary embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION FIRST EXEMPLARY EMBODIMENT

[0050]FIG. 1 is a circuit diagram of an angular velocity sensor inaccordance with a first exemplary embodiment of the present invention.An AC signal of about 1 Vp-p and 1.5 kHz is applied to a piezoelectricelement 11 a of a driver plate 11 from a driver circuit 15. Accordingly,driver plates 11 and 12 start a tuning fork vibration inward and outwardagainst a supporting pin 9 as a center. A voltage proportional to theapplied signal is induced at a piezoelectric element 12 a of a driverplate 12 by the tuning fork vibration and becomes a monitor signal shownas waveform A in FIG. 2 (corresponding to point A in FIG. 1), afterpassing a current amplifier 16 and a band pass filter 17. This signal isfed back to the driver circuit 15 through a full wave rectifier 18 andan AGC circuit 19 and thus a driving signal is automatically controlledin its amplitude.

[0051] In the detecting part of the sensor, when piezoelectric elements13 a and 14 a detect an angular velocity, both piezoelectric elements 13a and 14 a output angular velocity signals of +Q. These angular velocitysignals are shown in FIG. 2 as waveforms B and C, respectively. Theseangular velocity signals are then synthesized at point D, shown in FIG.1, thus becoming an angular velocity signal shown in FIG. 2 as waveformD. Angular velocity signal D is outputted from an output terminal 24after passing through a charging amplifier 20, a band pass filter 21, asynchronous detector 22 and a low pass filter 23. The angular velocitysignals at points E, F and G shown in FIG. 1 are shown in FIG. 2 aswaveforms E, F and G, respectively.

[0052] In the exemplary embodiment, although detector plates 13 and 14have to be set orthogonally relative to driver plates 11 and 12, it isessentially difficult to put them in true orthogonal directions andmoreover it is impossible to make piezoelectric elements 13 a and 14 aexactly the same in size and attaching configuration to detector plates13 and 14. As a result, piezoelectric elements 13 a and 14 a alwaysgenerate mechanical coupling signals, shown in FIG. 2 as waveforms B andC, other than the angular velocity signals described above. In thiscase, piezoelectric elements 13 a and 14 a are pasted on the same sidesurfaces of detector plates 13 and 14 and the centers of gravity ofdetector plates 13 and 14 deviate a little toward the sides withpiezoelectric elements 13 a and 14 a. Therefore, when driver plates 11and 12 make a tuning fork vibration, for example when they open outward,they open leaning toward the sides of piezoelectric elements 13 a and 14a. Accordingly, mechanical coupling signals generated at piezoelectricelements 13 a and 14 a are in a reciprocal phase as shown in FIG. 2 aswaveforms B and C. Therefore, when the mechanical coupling signals aresynthesized at point D shown in FIG. 1, the synthesized mechanicalcoupling signal becomes small. The synthesized mechanical couplingsignal is amplified at a charging amplifier 20 and an amplifier 25,rectified at a rectifier 26 and then the signal level is judged at ajudge circuit 28 and the judged result is outputted from a signal outputterminal 29. The signals at points H, I and J shown in FIG. 1 are shownin FIG. 2 as waveforms H, I and J, respectively. When signal I outputtedfrom filter 27 is between level “a” and level “b”, the output of judgecircuit 28 is in a low level as shown in FIG. 2 as waveform J and isoutputted from terminal 29.

[0053] When, for example, detector plate 14 shown in FIG. 1 is damagedor its lead wire is broken, both the angular velocity signal and themechanical coupling signal from piezoelectric element 14 a become zeroafter the malfunction, as shown in FIG. 2 as waveform C. As a result,only a mechanical coupling signal from piezoelectric element 13 aappears at point D shown in FIG. 1, and it becomes a much largermechanical coupling signal than when detector plate 14 was not damagedor its lead wire was not broken. Therefore, the output of filter 27becomes larger than level “a” shown in waveform I of FIG. 2 and a highlevel signal is outputted from judge circuit 28 as shown in FIG. 2 aswaveform J. When both detector plates 13 and 14 are damaged or both leadwires are broken, the output of filter 27 becomes smaller than level “b”shown in waveform I of FIG. 2 and a high level signal is also outputtedfrom judge circuit 28 as shown in FIG. 2 as waveform J. When such a highlevel signal is outputted, information that the angular velocity sensoris malfunctioning is transmitted.

SECOND EXEMPLARY EMBODIMENT

[0054]FIG. 3 is a circuit diagram of an angular velocity sensor inaccordance with a second exemplary embodiment of the present invention.In this exemplary embodiment, a synchronous detector 30 is insertedbetween amplifier 25 and filter 27. A synchronous detection is executedby using a feedback signal from the feedback circuit of a drivingsignal. Such a feedback signal is a phase shifted signal from the signalat point A through phase shifter 31 shown in FIG. 3. In other words,because the mechanical coupling signal flowing into amplifier 25contains an angular velocity signal, the level of the mechanicalcoupling signal is brought close to a correct value by canceling theangular velocity signal. The signal shown in FIG. 4 as waveform Aflowing at point A shown in FIG. 3 is delayed by 90 degrees at phaseshifter 31. If the output from amplifier 25 is detected to besynchronized with a signal H delayed by 90 degrees (shown in FIG. 4 aswaveform H), the angular velocity signal is canceled as shown in FIG. 4as waveform I. Therefore, it is possible to bring the mechanicalcoupling signal level inputted to filter 27 close to a correct value.

THIRD EXEMPLARY EMBODIMENT

[0055]FIG. 5 is a circuit diagram of an angular velocity sensor inaccordance with a third exemplary embodiment of the present invention.In this exemplary embodiment, when the mechanical coupling signalsoutputted from piezoelectric elements 13 a and 14 a are added at pointD, shown in FIG. 5, the sum is made to be zero as an initial setting.While the sums are not zero in the first and second exemplaryembodiments, in the third exemplary embodiment, the sum of themechanical coupling signals outputted from piezoelectric elements 13 aand 14 a is made zero by trimming either detector plate 13 or 14 at theinitial setting. It is shown in FIG. 6 as waveform D. For example, at anormal state before a malfunction (e.g., damage to detector 14 or abreak of its lead wire), no mechanical coupling signal is generated atpoint D shown in FIG. 5. However, after the malfunction, the mechanicalcoupling signal from piezoelectric element 14 a is generated and themechanical coupling signal appears at point D, as shown in FIG. 6 aswaveform D. As a result, the output of judge circuit 28 is a high levelat the malfunction as shown in FIG. 6 as waveform J. A signal informingthe angular velocity sensor's malfunction is then outputted from signaloutput terminal 29 through a logical sum circuit 32, as shown in FIG. 6as waveform L. In this exemplary embodiment, a feedback signal from thedriver circuit 15, that is an output of full wave rectifier 18, issupplied to logic sum circuit 32 through judge circuit 33. The angularsensor informs the malfunction via signal output terminal 29, even whendriver plates 11 and 12 are not driven. Accordingly, the driving signalis supplied to logical sum circuit 32 through judge circuit 33. Judgecircuit 33 outputs a high level when the feedback signal is zero becausedriver plates 11 and 12 are not driven and outputs a signal informingthe malfunction from signal output terminal 29 through logical sumcircuit 32.

[0056] In the composition where the output of charging amplifier 20 isinputted to amplifier 25 as a self diagnosis means as shown in thefirst, the second and the third exemplary embodiments, when a signalexceeding an input range of synchronous detector 22 is inputted fromband pass filter 21, the output signal at output terminal 24 sometimesvaries although no angular velocity signal is added. In this case, it isdesirable to change the composition to input the output signal of bandpass filter 21 to amplifier 25, to detect saturation of synchronousdetector 22 as a criterion for judging and to match a time constant offilter 27 with a time constant of low pass filter 23.

FOURTH EXEMPLARY EMBODIMENT

[0057]FIG. 7 is a circuit diagram of an angular velocity sensor inaccordance with a fourth exemplary embodiment of the present invention.Also in this exemplary embodiment, an initial setting is made so thatwhen the mechanical coupling signals from piezoelectric elements 13 aand 14 a are added, their sum becomes zero by trimming either detectorplate 13 or 14, like in the third exemplary embodiment. The signal frompiezoelectric element 13 a is amplified at a charging amplifier 20 a,the signal from piezoelectric element 14 a is amplified at a chargingamplifier 20 b, and they are added at adder 34. Adder 34 outputs a sumsignal that is outputted from output terminal 24, after being processed,as an angular velocity signal. Subtracter 35 subtracts the output ofcharging amplifier 20 b from the output of charging amplifier 20 a andthe result, after being processed, is outputted from signal outputterminal 29 as a self diagnosis signal. Waveforms at the indicatedpoints in FIG. 7 are shown in FIG. 8. Amplifier 25, rectifier 26 andfilter 27 can be omitted. Although the explanation was made using atuning fork type angular velocity sensor, it is possible to detect amalfunction using the mechanical coupling signal in various other typesof angular velocity sensors; e.g., triangular prism type, solid cylindertype, tuning fork type or tubular type; because such other types ofangular velocity sensors also generate a mechanical coupling signal.

FIFTH EXEMPLARY EMBODIMENT

[0058]FIG. 9 is a circuit diagram of an angular velocity sensor inaccordance with a fifth exemplary embodiment of the present invention.

[0059] An alternating signal of about 1 Vp-p and 1.5 kHz is applied froma driver circuit 15 to a piezoelectric element 11 a of a driver plate11. Driver plates 11 and 12 start tuning fork vibration inward andoutward against a supporting pin 9 as a center. A voltage proportionalto an applied signal is induced at a piezoelectric element 12 a ofdriver plate 12 by tuning fork vibration and is outputted from point Aas a monitor signal after passing through a current amplifier 16 and aband pass amplifier 17. The output signal is shown in FIG. 10 aswaveform A. This signal is fed back to a driver circuit 15 through anAGC (Automatic Grain Control) circuit 19 and the level of the drivingsignal is controlled to always be constant at point A. In the detectingpart of the circuit, the signals from piezoelectric elements 13 a and 14a are synthesized at point D and the synthesized signal is supplied to acharging amplifier 20. The monitor signal from point A synchronized witha tuning fork vibration is attenuated by an attenuator 36 and issupplied to a non-inverted input terminal of a charging amplifier 20after passing through an injector 37. The output of charging amplifier20 is outputted from an output terminal 24 after passing through a bandpass filter 21, a synchronous detector 22 and a low pass filter 23.Signal waveforms at point I (the output of attenuator 36), H (the outputof injector 37), E (the output of charging amplifier 20), F (the outputof synchronous detector 22) and G (the output of low pass filter 23) areshown in FIG. 10 as waveforms I, H, E, F and G, respectively.

[0060] In this exemplary embodiment, piezoelectric element 13 adetecting an angular velocity is glued on a detector plate 13 by anadhesive 8. A silver electrode 13 b is formed on piezoelectric element13 a as shown in FIG. 11(a).

[0061] Detector plate 13, piezoelectric element 13 a and silverelectrode 13 b form a parallel plate capacitor as shown in FIG. 11(b)and its equivalent circuit is shown in FIG. 11(c). The capacity of acapacitor formed by piezoelectric element 13 a is expressed by equation(1).

Cs1=ε*S/d  (1)

[0062] ε:permittivity of piezoelectric element,

[0063] S:area of the electrode, and

[0064] d:thickness of piezoelectric element.

[0065] Similarly, the capacity of a capacitor formed by piezoelectricelement 14 a is expressed by equation (2).

Cs2=ε*S/d  (2)

[0066] ε:permittivity of piezoelectric element,

[0067] S:area of the electrode, and

[0068] d:thickness of piezoelectric element.

[0069] There are the following relations between the sensitivities ofpiezoelectric elements detecting an angular velocity and capacities Csland Cs2 expressed by equations (1) and (2).

[0070] The sensitivity is proportional to area S and capacity C isproportional to area S; therefore, the sensitivity is proportional tocapacity C. Therefore, if a capacity variation can be detected, asensitivity variation can be conjectured and it is therefore possible todetect a sensitivity abnormality.

[0071] Now, monitor signal A at point A is attenuated at attenuator 36,as shown in waveform I of FIG. 10, and supplied to injector 37. Injector37 is composed of, for example, a capacitor and a resistor shown in FIG.12. A signal phase shifted against monitor signal A, as shown inwaveform H of FIG. 10, is supplied to a non-inverted input terminal ofcharging amplifier 20. However, because the inverted input and thenon-inverted input of charging amplifier 20 have virtually the samepotential, the signal from injector 37 supplied to the non-invertedinput terminal also appears at the inverted input terminal of chargingamplifier 20, as shown by waveform D in FIG. 10.

[0072] As a result, a displacement current ID shown by waveform D(broken line) of FIG. 10 appears at capacity components Csl and Cs2 ofpiezoelectric elements 13 a and 14 a connected to the inverted inputterminal and a voltage shown by waveform E of FIG. 10 is outputted fromcharging amplifier 20. The output voltage “ve” at point E is expressedby equation (3).

ve=Vm*α*(1/C0)*(Cs1+Cs2)*ID∠  (3)

[0073] ve:output voltage E (Vp-p) of charging amplifier,

[0074] Vm:monitor voltage (Vp-p),

[0075] α:attenuation factor (0<α<1) of attenuator 36,

[0076] ∠:phase shift (0°<<90°) by injector 37,

[0077] C0:feedback capacity (pF) of charging amplifier 20, and

[0078] ID:displacement current (pA).

[0079] Signal Vout obtained from output terminal 24 is expressed byequation (4).

Vout=A*D*Vm*α*(1/CO)*(Cs1+Cs2)*ID*sin  (4)

[0080] D:detection constant of synchronous detector 22 and

[0081] A:dc gain of low pass filter 23.

[0082] Signal E shown in FIG. 10 is phase shifted by ∠ against monitorsignal A and is detected at synchronous detector 22 after beingamplified at band pass filter 21. Here, only a signal componentcorresponding to the phase shift is extracted, amplified at low passfilter 23, and outputted from terminal 24 as a dc offset component.Usually, it is good to adjust the offset voltage of the output, forexample 2.5 V, considering this dc offset component.

[0083] From equation (3), because signal E shown in FIG. 10 isproportional to capacity Csl or Cs2 of piezoelectric element 13 a or 14a for angular velocity detection, respectively, for example, when adisconnection occurs at point B or C shown in FIG. 9, there is a signallevel variation as shown by waveforms E and F of FIG. 10 and as aresult, the voltage level at output terminal 24 varies. This levelvariation can indicate an abnormality, which abnormality is judged as asensor malfunction by, for example, a comparison to a threshold value ofthe level variation.

[0084] Because the input signal of injector 37 is obtained from themonitor signal A of the drive circuit 15 and the output signal isapplied to the input terminal of charging amplifier 20, whenever anycomponent or any part of the tuning fork, the drive circuit or thedetection circuit malfunction, a signal appears at output terminal 24 asa variation of the dc offset component and it is therefore alwayspossible to detect a sensor malfunction.

SIXTH EXEMPLARY EMBODIMENT

[0085]FIG. 13 is a circuit diagram of an angular velocity sensor inaccordance with a sixth exemplary embodiment of the present invention.In addition to the fifth exemplary embodiment, the input of injector 37is made to be selectively connected to the output of attenuator 36 or tothe ground, by a switch 38 controlled by an external signal from acontrol terminal 39. A circuit diagram of an essential part of thisembodiment is shown in FIG. 14 and the waveforms are shown in FIG. 15.

[0086] Because monitor signal I attenuated at attenuator 36 is usuallydisconnected from injector 37 by switch 38, monitor signal I is nottransmitted to injector 37 and accordingly, the sensor outputs are in anordinary state. When a signal shown by waveform J of FIG. 15, such as acheck signal from a computer, is applied to control terminal 39 shown inFIG. 13, switch 38 closes and signal I from attenuator 36 is transmittedto injector 37. As a result, the signals at each point vary as shown bywaveforms H, D, E and F of FIG. 15 and an offset voltage linked to thecheck signal applied to control terminal 39 is generated at outputterminal 24, as shown by waveform G of FIG. 15. Because this offsetvariation is determined by equation (4) of the fifth exemplaryembodiment, it is possible to know a sensor abnormality by monitoringthis offset variation.

SEVENTH EXEMPLARY EMBODIMENT

[0087]FIG. 16 is a circuit diagram of an angular velocity sensor inaccordance with a seventh exemplary embodiment of the present invention.The waveforms are shown in FIG. 17. The seventh exemplary embodimentdetails when an input terminal of the external signal for controllingthe switch 38 is used in common with output terminal 29 of judge circuit28. Judge circuit 28 monitors, for example, output E of chargingamplifier 20 and detects an abnormal voltage generated by, for example,an abnormal shock or vibration applied to the tuning fork from theoutside and outputs a signal to inform an abnormality from terminal 29to the outside. Although the control signal input terminal of switch 38is used in common with output terminal 29, the connect/disconnectlogical value is set to be inverse relative to the logical output of thejudge circuit 28. Therefore, in an ordinary state in which switch 38 isnot working, an abnormal voltage generated by an abnormal shock orvibration of the tuning fork applied from the outside is detected andthe abnormality is indicated to the outside (by a suitable signal). In astate in which the sensor is checked, by inputting the check signal fromterminal 29 and monitoring the sensor output of terminal 24, amultifunction diagnosis for malfunction can be made using only oneterminal and therefore a high cost performance is realized.

[0088] In the case in which connect/ disconnect logical value of switch38 is set to be equal to the logical value of judge circuit 28, it ispossible to transfer to a self diagnosis mode by forcibly working switch38 by the logical output of judge circuit 28 and it is possible to keepoutputting a signal as an abnormality detection state at terminal 29until a reset signal for a self diagnosis mode is supplied from theoutside.

[0089] Here, although an exemplary embodiment is described in which asensor working state is indicated using a sensor signal, it is alsopossible to offset adjust the sensor output. In this case, it ispreferred to adjust an attenuation amount by attenuator 36 or adjust theoffset by adjusting the phase shift amount by injector 37. It is alsopossible to compensate for temperature for the sensor output by using atemperature sensitive element so that an attenuation amount or a phaseshift amount varies with temperature.

[0090] It is similar, if the output of injector 37 is applied to bandpass filter 21 and synchronous detector 22.

EIGHTH EXEMPLARY EMBODIMENT

[0091]FIG. 20(a) is a circuit diagram of an angular velocity sensor inaccordance with an eighth exemplary embodiment of the present invention.FIG. 20(b) shows a cross sectional view of a sensor element 40 of thepresent embodiment cut at the plane normal to the y-axis including lineW-W (denoted by W-W plane or W-W cross section hereinafter). FIG. 20(c)shows detailed current distribution in the W-W cross section of thesensor element 40. In FIG. 20(a), elements which have the same functionas in FIGS. 9, 13 and 16 are denoted by the same reference numerals anda detailed explanation thereto is omitted.

[0092] As shown in FIGS. 20(a), 20(b) and 20(c), the sensor element 40(e.g., crystal (quartz) tuning fork vibrator) is constructed by directlybonding two crystal tuning fork vibrator pieces 40 a and 40 b at bondingsurface 41 in such a manner that the directions of the electric axes Eof the vibrator pieces 40 a and 40 b are aligned opposite to each otheralong the width direction (along the x-axis direction) of the vibratorpieces. Thus the sensor element 40 has a bimorph structure.

[0093] The sensor element is constructed by forming monitor electrode42, driving electrodes 43, 46 and 47 (see FIGS. 20(a), (b)), and sensingelectrodes 44 and 45, made of metal such as gold, on the appropriatesurfaces of the crystal tuning fork vibrator pieces 40 a and 40 b.

[0094] FIGS. 20(b) and 20(c) show the situation when polarity of drivingelectrode 47 is positive (denoted by D+), polarity of driving electrodes43 and 46 is negative (denoted by D−), polarity of sensing electrode 44is negative (denoted by S−) and polarity of sensing electrode 45 ispositive (denoted by S+). Also, monitor electrode 42 is denoted by M.

[0095] First, an explanation will be made for individual roles of thecircuit components newly introduced in this exemplary embodiment.Turning to FIG. 20(a), current amplifiers 50 and 51, having a phasedifference of 0 or 180 degrees between input current and output voltage,amplify the signals from sensing electrodes 45 and 44, respectively.Differential amplifier 52 amplifies and outputs the difference betweenthe outputs of current amplifiers 50 and 51. 90 degree phase shifter 53shifts the phase of the signal outputted from differential amplifier 52by 90 degrees. Capacitor 54 is inserted between the input terminal ofcurrent amplifier 51 and the reference level in order to balance withcapacitor 37 a which works as an injector. Accordingly, the capacitancevalue of capacitor 54 is set nearly the same as that of capacitor 37 a.By this configuration, even if the charge/discharge current in capacitor37 a is induced by the reference level variation owing to the voltagevariation of the power source of the sensor and is inputted to currentamplifier 50, this current balances with the charge/discharge current inthe capacitor 54, so that it is canceled out by differential amplifier52. As a result, a sensor with high durability against the voltagevariation of the power source is obtained. Digital adjusting circuit 63adjusts the output level of the sensor.

[0096] Next the fundamental operation of the angular velocity sensorshown in FIG. 20(a) is explained. As shown in FIG. 20(a), driven bydriver circuit 15, sensor element 40 starts to vibrate and at the sametime generates, at its monitor electrode 42, a monitor signalproportional to the intensity of the vibration. This monitor signal isprocessed at current amplifier 16 (monitor circuit) and AGC circuit 19and finally is fed back to driver circuit 15. Thus, driving of sensorelement 40 is performed stably by drive means composed of the closedloop.

[0097] The vibration of sensor element 40 is a tuning fork vibrationalong the x-axis direction with a velocity V as shown in FIG. 20(a).When an angular velocity around the y-axis is applied to the sensorelement 40, a Coriolis force Fc=m×V× x (where m is a mass of arm) isgenerated in the crystal tuning fork vibrator pieces 40 a and 40 b alongthe z-axis direction.

[0098] Internal current distribution in a W-W cross section of each armof the sensor element 40 is shown in FIG. 20(c) when the above-mentionedCoriolis force is generated in each arm. As each arm of the sensorelement 40 bends in opposite directions to each other along the z-axis,currents with almost the same amplitudes and opposite polarities aregenerated in sensing electrodes 44 and 45 via monitor electrode 42 anddriving electrodes 43, 46 and 47, as shown in FIG. 20(c).

[0099] Currents i_(s)− and i_(s)+, flowing at each sensing electrode 44and 45, are expressed by formulae (5) and (6), respectively.

i _(s) _(⁻) =−(i _(s) _(⁻) _(−D) ⁻ +i _(M−S) _(⁻) +i _(D)+_(−S) −+i _(S)_(⁻) ⁻ _(^(D−)) )  (5)

i _(s) _(⁺⁼⁽) i _(s) _(⁺) _(−D) _(⁻) +i _(M−S) _(⁺) +i _(D) _(⁺) _(−S)_(⁺) +i _(s) _(⁺) _(−D) _(⁻) )  (6)

[0100] The currents i_(s) _(⁻) and i_(s) _(⁺) expressed by formulae (5)and (6) are inputted to the current amplifiers 50 and 51 as indicated byd and e in FIG. 20(a). They are converted to voltage outputs andinputted to the differential amplifier 52. The output of differentialamplifier 52 is inputted to phase shifter 53 where its phase is shiftedby 90 degrees. The output of the phase shifter 53 is detected bysynchronous detector 22 in synchronous with the monitor signal at point‘a’. The output of the synchronous detector 22 is inputted to low passfilter 23 where its gain and offset are adjusted by digital adjustingcircuit 63 and finally outputted to output terminal 24.

[0101] Operational waveform of each part of the present angular velocitysensor shown in FIG. 20(a) is illustrated in FIG. 21. In FIG. 21, thesignal waveform indicated by ‘a’ corresponds to a monitor signal atpoint ‘a’ monitoring the vibration level of sensor element 40 in astationary operation state. Signal waveforms indicated by ‘b’ and ‘c’correspond to the driving signals having opposite phases to each otherfor driving sensor element 40. The monitor signal is attenuated byattenuator 36 as shown in the waveform indicated by 1. This signal isthen supplied, through switch 38, to capacitor 37 a (waveform indicatedby m). Here, the switch 38 operates intermittently in response to anexternal diagnosis request signal supplied to control terminal 39(waveform indicated by o).

[0102] Caused by the signal voltage applied to capacitor 37 a, adisplacement current with its phase shifted by 90 degrees against themonitor signal is induced (the waveform indicated by n). Thisdisplacement current is inputted to the current amplifier 50 and isconverted to a voltage output (waveform indicated by f).

[0103] Each output of current amplifiers 50 and 51 (waveform indicatedby f and g respectively) is inputted to differential amplifier 52.Differential amplifier 52 outputs a waveform indicated by h. The outputof differential amplifier 52 is inputted to phase shifter 53 and itsphase is shifted by 90 degrees, resulting in a waveform with the samephase as (indicated by i) or opposite phase relative to the monitorsignal indicated by ‘a’. The output waveform of phase shifter 53(indicated by i) is detected by synchronous detector 22 in synchronouswith the monitor signal ‘a’.

[0104] Finally, the output from synchronous detector 22 (waveformindicated by j) is inputted to low pass filter 23 where its gain andoffset are adjusted by digital adjusting circuit 63 and outputted tooutput terminal 24 (waveform indicated by k).

[0105] Self diagnosis operation, performed upon request via the externaldiagnosis request signal (waveform indicated by o), generates DCvariation V (indicated in the waveform of k).

[0106] In order to enable detection of abnormality of the sensor, thelevel of this DC variation V in ordinary operation is set to apredetermined value by using , for example, an attenuator 36. If anabnormality such as wire breakage happens to occur at point Z in FIG.20(a) for example, the level of DC variation V b e comes different fromthe above predetermined value (indicated by Z in the waveform of k)while the external diagnosis request signal is applied. Thus, theabnormality of the present angular velocity sensor can be detected bywatching the change in the level of the DC variation V, using thepredetermined V as a threshold.

[0107] Although a capacitor is used for the injector in this embodiment,it is possible to use a resistor also.

NINTH EXEMPLARY EMBODIMENT

[0108]FIG. 22 is a circuit diagram of an angular velocity sensor inaccordance with a ninth exemplary embodiment of the present invention.In FIG. 22, elements which have the same function as in FIG. 20(a) aredenoted by the same reference numerals and a detailed explanationthereto is omitted.

[0109] As shown in FIG. 22, charging amplifiers 50 a and 50 b withinput-to-output phase shift of 90 or 270 degrees are used in thisembodiment in place of current amplifiers 50 and 51 in FIG. 20(a). Byusing the charging amplifiers 50 a and 50 b, the phase shifter 53 shownin FIG. 20 can be omitted.

[0110] Operational waveform of each part of the present angular velocitysensor shown in FIG. 22 is illustrated in FIG. 23. Each waveform shownin FIG. 23 is essentially the same as that of FIG. 21. What differs is,the phase of the waveform indicated by f deviates by 90 degrees and thephase of the waveform indicated by i deviates by 180 degrees (orinverted).

TENTH EXEMPLARY EMBODIMENT

[0111]FIG. 24 is a circuit diagram of an angular velocity sensor inaccordance with a tenth exemplary embodiment of the present invention.In FIG. 24, elements which have the same function as in FIG. 20(a) aredenoted by the same reference numerals and a detailed explanationthereto is omitted.

[0112] In FIG. 24, a timer circuit 61 is introduced which operates inresponse to the external diagnosis request signal supplied to controlterminal 39. With this timer circuit 61, it becomes possible to realizevarious functions such as to delay, interrupt or extend the externaldiagnosis request signal applied to control terminal 39.

[0113] Operational waveform of each part of the present angular velocitysensor shown in FIG. 24 is illustrated in FIG. 25. Each waveform shownin FIG. 25 is essentially the same as that of FIG. 21. What differs is,the pulse width length of the waveform indicated by o is shorter and theoutput waveform of timer circuit 61 (waveform indicated by q) is added.

[0114] Thus, by inputting short pulse external diagnosis request signalindicated by o, a long continuing signal indicated by q can be obtained,which can keep switch 38 on for a long time. Accordingly, freedom ofinterface design of the external control circuit can be improved.

ELEVENTH EXEMPLARY EMBODIMENT

[0115]FIG. 26(a) is a circuit diagram of an angular velocity sensor inaccordance with an eleventh exemplary embodiment of the presentinvention. In FIG. 26(a), elements which have the same function as inFIG. 20(a) are denoted by the same reference numerals and a detailedexplanation thereto is omitted.

[0116] The width of driving electrode 43 a in FIG. 26(a) is set narrowerthan driving electrode 43 in FIG. 20(a). Logical sum circuit block 67;which includes rectifiers 26 a and 26 b, comparators 28 a and 28 b, andlogical sum circuit 32; works as a judge circuit. It always monitors thelevel of currents d and e outputted from sensing electrodes 45 and 44,respectively, and, if any damage of the sensor happens to occur, outputsa self diagnosis signal to diagnosis signal output terminal 29 a, evenif an external diagnosis request signal is not provided to controlterminal 39.

[0117] Operational waveform of each part of the present angular velocitysensor shown in FIG. 26(a) is illustrated in FIG. 27. Each waveformshown in FIG. 27 is essentially the same as that of FIG. 21. Whatdiffers is that, waveforms of currents d and e outputted from sensingelectrodes 45 and 44 respectively, and waveforms indicated by s, u and ware newly added.

[0118] Sensor element 40 is in a tuning fork vibration along the x-axisdirection with velocity V as shown in FIG. 26(a). Caused by thisvibration, various currents flow between each electrode in the sensorelement 40 as shown in FIG. 26(b). Currents i_(s) _(⁻) and i_(s) _(⁺) ,flowing at each sensing electrode 44 and 45, are expressed by formulae(7) and (8), respectively.

i _(s) _(⁻) i ₂ _(⁻) i ₄ _(⁻) i ₅ +i ₇  (7)

i _(S) _(⁺) =i ₁ _(⁻) i ₃ _(⁻) i ₆ +i ₈  (8)

[0119] Because the magnitudes of i₁ to i₄ are almost the same, i₂ and i₄cancel each other and i₁ and i₃ also cancel each other in formulae (7)and (8). But as the widths of driving electrodes 43 a and 47 aredifferent, i5 is not equal to i₇, and i₆ is not equal to i₈. Accordinglycurrents i_(S) _(⁻) and i_(S) _(⁺) are finally expressed by formulae (9)and (10).

i _(s) _(⁻) = ⁻ i ₅ +i ₇  (9)

i _(s) _(⁺) = ⁻ i ₆ +i ₈  (10)

[0120] As magnitudes of i₅ and i₆ are almost the same and the magnitudesof i₇ and i₈ are also almost the same, the output v of differentialamplifier 52 is expressed by formula (11) as long as the sensor worksnormally.

v=V(i_(s) _(⁺⁻) i _(s) _(⁻) )=0  (11)

[0121] But when wire breakage or such abnormality occurs at point yshown in FIG. 26(a) and at a timing Y as shown in FIG. 27, current dbecomes zero so that the output of differential amplifier 52 is nolonger kept balanced, as shown in formula (12) (waveform indicated byh).

v=V(⁻ i _(s) _(⁻) )=V(i ₅ _(⁻) i ₇)  (12)

[0122] Voltage v expressed by formula (12) is inputted, via phaseshifter 53, to rectifier 26 a and is outputted as a rectified waveformat point s. In the logical sum circuit block 67, the waveform at point sis compared with a predetermined threshold value (th) by comparator 28a. When the waveform at point s exceeds the threshold value, comparator28 a outputs a high level shown by u. Thus, even if the externaldiagnosis request signal is not supplied to control terminal 39, logicalsum circuit 32 outputs a high level as shown by w in FIG. 27 when anyabnormality occurs in the sensor. Accordingly, abnormalities such aswire breakage or others can be detected always and instantly by watchingdiagnosis signal output terminal 29 a. Further, in normal operation, thesignal at point r (i.e., the rectified signal of the signal at point a)is set to exceed the threshold of comparator 28 b, so that comparator 28b outputs a low level signal at point t. Therefore, when the monitorsignal at point a is in a normal state, logical sum circuit 32 outputs alow level signal to diagnosis signal output terminal 29 a. But when someabnormality in the signal at point a occurs and its value decreasesbelow the threshold of comparator 28 b, the output of comparator 28 bbecomes high and so logical sum circuit 32 outputs a high level signal,thus enabling detection of the abnormality. Accordingly, by introducinglogical sum circuit block 67, it becomes possible to diagnose theabnormality of both the driver circuit 15 and the angular velocitydetection circuit at the same time.

[0123] By adopting the aforementioned construction, it is unnecessary toprovide any additional means for diagnosis such as an electrode forpseudo-driving on the sensor element 40. Also, it becomes easy to designelectrodes with improved driving efficiency when a smaller size sensorelement is required. Further, an angular velocity sensor with highperformance of abnormality detection can be realized.

[0124] In FIG. 27, waveforms at various circuit points, when theexternal diagnosis request signal is inputted (waveform o), are alsoshown by adding a letter 0 to the name of each point (as h_(o), i_(o),j_(o), k_(o), etc.) for the sake of easier understanding. Thesewaveforms are basically the same as shown in FIG. 21.

TWELFTH EXEMPLARY EMBODIMENT

[0125]FIG. 28(a) is a circuit diagram of an angular velocity sensor inaccordance with a twelfth exemplary embodiment of the present invention.FIG. 28(b) shows electrostatic coupling capacitances formed between eachelectrode in a cross section of the sensor element 40 of the presentembodiment cut by the W-W plane. In FIGS. 28(a) and 28(b), elementswhich have the same function as in FIGS. 20(a) and 20(b) are denoted bythe same reference numerals and a detailed explanation thereto isomitted.

[0126] The electrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58e and 58 f, shown in FIG. 28(b), sometimes modify intrinsic outputsignals outputted from the sensor element 40 and induce an undesirableoffset voltage in the output angular velocity signal. The presentembodiment relates to an adjusting circuitry to eliminate such influenceof the electrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58 eand 58 f.

[0127] In FIG. 28(a), a signal generator 62 generates a signal for usein the adjusting operation. In order to improve accuracy of adjusting,the frequency of the signal generated by signal generator 62 is setdifferent from the frequency of the characteristic vibration mode of thesensor element 40 so as not to induce vibration in the sensor.

[0128] The signal generated by signal generator 62 is supplied, as apositive polarity signal, to driving electrode 47 for pseudo-driving.Also, it is inverted by driving circuit 15 and supplied to drivingelectrodes 43 and 44 for pseudo-driving as a negative polarity signal.Here, the pseudo-driving means provides a test signal to the sensorelement 40 for an adjusting operation, without vibrating the sensorelement 40.

[0129] Owing to the coupling by electrostatic coupling capacitors 58 a,58 b, 58 c, 58 d, 58 e and 58 f formed between driving electrodes 43, 46and 47, detected signals from sensor element 40 are modified. Themodified signal is called a “coupled signal”.

[0130] Switches 55 and 56 select the polarity of the driving signalsupplied to adjustor 36 a in response to the switching signal fromdigital adjusting circuit 63. They switch, in accordance with thepolarity of the coupled signals detected at sensor element 40, thepolarity of the quasi-driving voltage applied to driving electrodes 43,46 and 47.

[0131] Switch 57 is for stopping the ordinary driving of the sensorelement 40 by breaking the self-driving closed loop during the adjustingoperation. Switches 60 and 66 enable canceling the unwanted signalinduced by electrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58e and 58 f by use of the signal supplied to adjustor 36 a. In thisaction switch 66 is usually closed.

[0132] When the values of electrostatic coupling capacitors 58 a, 58 b,58 c, 58 d, 58 e and 58 f are small and negligible, a more stablemonitor signal (signal at point a) can be used by closing switch 60 inplace of closing switch 66. By using the monitor signal, the initialvalue of the unwanted signal from sensor element 40 induced byelectrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58 e and 58 fcan be adjusted.

[0133] Terminal 65 is provided in order to monitor the pseudo-drivingsignal applied to sensor element 40 during the adjusting process. Byusing terminal 65, it becomes unnecessary to touch test probes tosoldered portions, thus avoiding damaging the soldered portions. Also,it becomes possible to avoid a spurious signal being picked up by thetest probe which becomes a new signal source and couples with thesensing electrodes 44 and 45 of the sensor element 40.

[0134] Digital adjusting circuit 63 supplies a control signal to adjustgain and offset of low pass filter 23, thus adjusting the output levelof the present angular velocity sensor at output terminal 24. Also,digital adjusting circuit 63 digitally selects the adjusting signal bystoring the adjusting amount of adjustor 36 a and by controlling theswitches 55, 56, 60 and 66.

[0135] Operational waveforms of each part of the present angularvelocity sensor before, during and after the adjusting operation areshown in FIGS. 29(a), 29(b) and 29(c), respectively. Each waveform shownin FIGS. 29(a), 29(b) and 29(c) is essentially the same as that of FIG.21. What differs is that, several waveforms are modified by the on/offsignal of switch 57 and by the signal from signal generator 62. Thestate of switch 57 is shown by waveform indicated by sw, where a highlevel means the switch is closed. The operational state of signalgenerator 62 is shown by waveform indicated by sg, where a high levelmeans the signal generator is in operation.

[0136] Current signals d and e, shown in FIG. 29(a), are modified byelectrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58 e and 58 fshown in FIG. 28(b). The capacitance value of electrostatic couplingcapacitors 58 a, 58 b, 58 c, 58 d, 58 e and 58 f varies easily caused bydifferences in shape, distance and position of each electrode, and bydifference in shape of the sensor element 40, resulting in a variationof the electrostatic coupling capacitors C. Current signals d and e notcanceled by differential amplifier 52 induce a differential coupledcurrent ·C·Vd (waveform at point h), where a n d Vd are respectively theangular frequency and amplitude of the driving voltage. This signal atpoint h is phase shifted by 90 degrees phase shifter 53 and is inputtedto synchronous detector 22 as a signal with the same phase as themonitor signal (waveform at point a), and is finally outputted to outputterminal 24 as an offset voltage V.

[0137] As the offset voltage is proportional to ·C·Vd, the drivingvoltage is an important factor in generating the offset voltage. Becausethe amplitude of the driving voltage is determined automatically by thedriving closed loop including sensor element 40, the driving voltage iseasily affected by various factors such as a temperature dependence ofthe piezoelectric property of the material constructing sensor element40. Piezoelectric property of crystal material especially showsexponential increase with temperature.

[0138] Thus, if the sensor element 40 has a non-negligible level ofcoupling, the offset voltage of an output of the sensor shows anon-linear temperature dependence in a higher temperature range.Accordingly compensation means becomes complicated. Also, if thecharacteristics of the sensor varies with time it directly generates thevariation in the offset voltage and the reliability of the sensorbecomes poor.

[0139] In order to prevent this offset voltage variation, the presentinvention introduces a test period for forcibly stopping the vibrationof sensor element 40, to which quasi-driving voltages b and c aresupplied from a signal generator 62. In the test period, adjustor 36 aworks to reduce the signal at point h or i which is proportional to thedifference between two output current signals d and e induced byelectrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58 e and 58 f.By doing so, the accuracy of adjusting, and as a result, the accuracy ofthe sensor is improved. The frequency of the quasi-driving signal fromsignal generator 62 may be selected to be other than the characteristicvibration frequency of the sensor element 40.

[0140] Now the process for reducing V is explained when a ladder networkresistor is used as adjustor 36 a and capacitor 37 b is used as aninjector for compensation. As shown in FIG. 29(b), quasi-driving voltageb and c with a trapezoidal waveform are generated when signal generatoris in a working state. Denoting a capacitance of capacitor 37 b as C anda constant of ladder network resistor used for reducing V as , theamount of adjusting signal is expressed by formula (13).

C·Vd  (13)

[0141] Accordingly, by adjusting so as to make the amount expressed byformula (14) zero, the waveforms at point h and point i reach zero asshown in FIG. 29(b), supposing C and C are stable against temperature.

C Vd−C·Vd=(C−C·)·Vd  (14)

[0142] As a result, after the above-mentioned adjusting operation, thewaveforms at point h, i and j become almost zero as shown in FIG. 29(c)and the offset voltage V, in which the influence of driving voltage Vdis suppressed, is outputted to output terminal 24.

[0143] By integrating capacitor 37 b into a semiconductor integratedcircuit together with other circuit blocks, portions connected bysoldering are reduced and the reliability of the sensor is furtherimproved.

[0144] During the adjusting period, is usually determined so as toadjust the signal level (at point i) of terminal 64 to zero, bymonitoring the pseudo-driving signal at terminal 65 and the signal atterminal 64 using an oscilloscope or the like. The adjustment isperformed by successively sending digital data to the ladder networkresistor and finding the optimum digital data that gives zerodifferential voltage at terminal 64 induced by the current signal d ande. The obtained optimum digital data is stored in a memory such as ROM.Thus, a highly accurate sensor, in which the influence of theelectrostatic coupling capacitors 58 a, 58 b, 58 c, 58 d, 58 e and 58 fis suppressed in a normal operating condition, can be obtained.

[0145] Although in this exemplary embodiment only the case in which theoffset voltage V at output terminal 24 is set to infinitesimally zero byadjusting is explained, it is also possible to set the offset voltage Vto a non-zero definite value by adjusting . Also, by using a temperaturesensitive device as the ladder network resistor and capacitor 37 b, itis possible to perform the adjusting so as to include temperaturecompensation.

[0146] Although in this exemplary embodiment explanation is made onlyfor crystal or quartz as a sensor element 40, it is also possible to usepiezoelectric ceramics, silicon, or the combination of silicon andpiezoelectric film as the vibrator material.

[0147] Also, although the construction of the present invention withrespect to the eighth through twelfth exemplary embodiments wasdescribed using a current amplifier, differential amplifier, phaseshifter and synchronous detector, the present invention is not limitedto this construction. In particular, any synchronous demodulator thatcan synchronously detect the output of a differential amplifier andoutputs the angular velocity signal, such as the circuit block combininga detector and phase shifter, can be used.

THIRTEENTH EXEMPLARY EMBODIMENT

[0148]FIG. 30 is a circuit diagram of an angular velocity sensor inaccordance with a thirteenth exemplary embodiment of the presentinvention. In FIG. 30, elements which have the same function as in FIG.20(a) are denoted by the same reference numerals and a detailedexplanation thereto is omitted.

[0149] In FIG. 30, synchronous demodulator 69 shifts the phase of thedifference of the outputs of current amplifiers 50 and 51 by 90 degrees,then sample-holds the shifted signal, and finally synchronously detectsthe sample-held signal. As synchronous demodulator 69 contains thesample-hold function, saturation of the circuit caused by excessiveunwanted signals generated in sensor element 40 can be avoided.

[0150] Although in this exemplary embodiment, explanation is made on thesynchronous demodulator including a 90 degrees phase shifter,sample-holder, and synchronous detector, the present invention is notlimited to this construction. Any circuit block which functions for thesame purpose can be used instead.

[0151] Thus, an angular velocity sensor of the present invention candetect from a state of the mechanical coupling signal whether theangular velocity signal is in a state which can perform a correctdetection or not. Moreover, because the mechanical coupling signal isalways generated, it is unnecessary to provide independent means forgenerating the mechanical coupling signal and the composition of thesensor becomes very simple and highly reliable for self diagnosis.

What is claimed is:
 1. An angular velocity sensor comprising: a sensorelement including a vibrating part and a detector part for detecting anangular velocity; a drive unit including a driver circuit and a monitorcircuit, wherein said driver circuit supplies a driving signal to thevibrating part of said sensor element and wherein said monitor circuitreceives a monitor signal outputted from said sensor element; adetection unit including a pair of charging amplifiers or currentamplifiers, a differential amplifier and a synchronous demodulator,wherein said pair of charging amplifiers or current amplifiers receiveoutputs from the detector part of said sensor element, said differentialamplifier amplifies a difference in outputs from said pair of chargingamplifiers or current amplifiers and wherein said synchronousdemodulator detects an output from said differential amplifier insynchronous with the driving signal from said drive unit and outputs anangular velocity signal; and a self diagnosis unit for outputting adiagnosis signal to detect an abnormality of said sensor element bycoupling a signal synchronized with said driving signal to a circuit,said circuit having an output coupled to said synchronous demodulator.2. An angular velocity sensor comprising: a sensor element including avibrating part and a detector part for detecting an angular velocity; adrive unit including a driver circuit and a monitor circuit, whereinsaid driver circuit supplies a driving signal to the vibrating part ofsaid sensor element and wherein said monitor circuit receives a monitorsignal outputted from said sensor element; a detection unit including apair of charging amplifiers or current amplifiers and a synchronousdemodulator, wherein said pair of charging amplifiers or currentamplifiers receive outputs from the detector part of said sensor elementand wherein said synchronous demodulator sample-holds an output fromsaid pair of charging amplifiers or current amplifiers in synchronouswith the driving signal from said drive unit and outputs an angularvelocity signal; and a self diagnosis unit for outputting a diagnosissignal to detect an abnormality of said sensor element by coupling asignal synchronized with said driving signal to a circuit, said circuithaving an output coupled to said synchronous demodulator.
 3. An angularvelocity sensor comprising: a sensor element including a vibrating partand a detector part for detecting an angular velocity; a drive unitincluding a driver circuit and a monitor circuit, wherein said drivercircuit supplies a driving signal to the vibrating part of said sensorelement and wherein said monitor circuit receives a monitor signaloutputted from said sensor element; a detection unit including a pair ofcurrent amplifiers, a differential amplifier, a phase shifter and asynchronous detector, wherein said pair of current amplifiers receiveoutputs from the detector part of said sensor element, said differentialamplifier amplifies a difference in outputs from said pair of currentamplifiers, said phase shifter shifts the phase of an output of saiddifferential amplifier by 90 degrees and wherein said synchronousdetector detects an output from said phase shifter in synchronous withthe driving signal from said drive unit and outputs an angularvelocitysignal; and a self diagnosis unit for outputting a diagnosis signal todetect an abnormality of said sensor element by coupling a signalsynchronized with said driving signal to a circuit, said circuit havingan output coupled to said synchronous detector.
 4. An angular velocitysensor as recited in claim 1 , wherein said signal synchronized withsaid driving signal is coupled to an input terminal of said pair ofcharging amplifiers or current amplifiers.
 5. An angular velocity sensoras recited in claim 1 , wherein said signal synchronized with saiddriving signal is an output from said monitor circuit.
 6. An angularvelocity sensor as recited in claim 1 , wherein said self diagnosis unitcomprises an attenuator and an injector, wherein said attenuatorattenuates said signal synchronized with said driving signal and saidinjector injects the signal outputted from said attenuator to a circuit,said circuit having an output coupled to said synchronous demodulator.7. An angular velocity sensor comprising: a sensor element including adriver part and a detector part for detecting an angular velocity; adriver circuit for supplying a driving signal to the driver part of saidsensor element, wherein a monitor signal is output from said sensorelement and coupled to said driver circuit; a detection unit including acharging amplifier and a synchronous detector, wherein an output fromthe detector part of said sensor element is applied to said chargingamplifier, and wherein said synchronous detector receives both a signalsynchronized with said driving signal and an output of said chargingamplifier, said detection unit outputting an angular velocity signal;and a self diagnosis unit for detecting an abnormality of said sensorelement and outputting a self diagnosis signal by coupling said signalsynchronized with said driving signal to an input of said synchronousdetector, wherein said self diagnosis unit comprises: an attenuator forattenuating the signal synchronized with said driving signal and acapacitor for injecting the signal synchronized with said driving signalfrom said attenuator to a circuit, said circuit having an output coupledto said synchronous detector.
 8. An angular velocity sensor as recitedin claim 6 , wherein said injector comprises a capacitor.
 9. An angularvelocity sensor comprising: a sensor element including a driver part anda detector part for detecting an angular velocity; a driver circuit forsupplying a driving signal to the driver part of said sensor element,wherein a monitor signal is output from said sensor element and coupledto said driver circuit; a detection unit including a charging amplifierand a synchronous detector, wherein an output from the detector part ofsaid sensor element is applied to said charging amplifier, and whereinsaid synchronous detector receives both a signal synchronized with saiddriving signal and an output of said charging amplifier, said detectionunit outputting an angular velocity signal; and a self diagnosis unitfor detecting an abnormality of said sensor element and outputting aself diagnosis signal by coupling said signal synchronized with saiddriving signal to an input of said synchronous detector, wherein saidself diagnosis unit comprises: an attenuator for attenuating the signalsynchronized with said driving signal and a resistor for injecting thesignal synchronized with said driving signal from said attenuator to acircuit, said circuit having an output coupled to said synchronousdetector.
 10. An angular velocity sensor as recited in claim 6 , whereinsaid injector comprises a resistor.
 11. An angular velocity sensor asrecited in claim 6 , wherein said attenuator includes a ladder networkresistor capable of digitally adjusting an amplitude and/or phase of aninput signal.
 12. An angular velocity sensor as recited in claim 1 ,further including a changing unit for changing said self diagnosis unitto either a working state or a non-working state.
 13. An angularvelocity sensor as recited in claim 12 , wherein said changing unit is aswitch for connecting or disconnecting, in accordance with an externalhandling, said signal synchronized with said driving signal to acircuit, said circuit having an output coupled to said synchronousdemodulator.
 14. An angular velocity sensor as recited in claim 12 ,wherein said changing unit comprises a timer circuit for connecting ordisconnecting for a given time, in accordance with an external handling,said signal synchronized with said driving signal to a circuit, saidcircuit having an output coupled to said synchronous demodulator.
 15. Anangular velocity sensor as recited in claim 2 , further including ajudge unit for continuously judging an abnormality of said sensorelement by detecting an output signal level of said detection unitduring a non-working state of said self diagnosis unit.
 16. An angularvelocity sensor as recited in claim 15 , wherein said self diagnosisunit comprises an attenuator for attenuating said signal synchronizedwith said driving signal, and an injector for injecting a signal fromsaid attenuator to a circuit, said circuit having an output coupled tosaid synchronous demodulator, wherein said changing unit is disposedbetween said attenuator and said injector.
 17. An angular velocitysensor as recited in claim 15 , wherein said changing unit is a switchfor connecting or disconnecting, in accordance with an externalhandling, said signal synchronized with said driving signal to acircuit, said circuit having an output coupled to said synchronousdemodulator.
 18. An angular velocity sensor as recited in claim 15 ,wherein said changing unit comprises a timer circuit for connecting ordisconnecting for a given time, in accordance with an external handling,said signal synchronized with said driving signal to a circuit, saidcircuit having an output coupled to said synchronous demodulator.
 19. Anangular velocity sensor as recited in claim 1 , wherein said sensorelement comprises vibrators composed of at least one of crystal,silicon, the combination of silicon and piezoelectric film andpiezoelectric ceramic material.
 20. An angular velocity sensorcomprising: a sensor element including a vibrating part and a detectorpart for detecting an angular velocity; a drive unit including a drivercircuit and a monitor circuit, wherein said driver circuit supplies adriving signal to the vibrating part of said sensor element and saidmonitor circuit receives a monitor signal outputted from said sensorelement; a detection unit including a pair of charging amplifiers orcurrent amplifiers, a differential amplifier and a synchronousdemodulator, wherein said pair of charging amplifiers or currentamplifiers receive outputs from the detector part of said sensorelement, said differential amplifier amplifies a difference in outputsfrom said pair of charging amplifiers or current amplifiers and whereinsaid synchronous demodulator detects an output from said differentialamplifier in synchronous with the driving signal from said drive meansand outputs an angular velocity signal; and an adjusting unit foradjusting a signal from said detector part by coupling a signalsynchronized with said driving signal to a circuit, said circuit havingan output coupled to said synchronous demodulator, wherein saidadjusting unit comprises an adjustor for varying said signalsynchronized with said driving signal and an injector for injecting anoutput signal from said adjustor to a circuit, said circuit having anoutput coupled to said synchronous demodulator.
 21. An angular velocitysensor as recited in claim 20 , wherein said injector comprises acapacitor.
 22. An angular velocity sensor as recited in claim 20 ,wherein said injector comprises a resistor.
 23. An angular velocitysensor as recited in claim 20 , wherein said adjustor includes a laddernetwork resistor capable of digitally adjusting an amplitude or phase ofan input signal.
 24. An angular velocity sensor as recited in claim 20 ,wherein said adjustor is capable of adjusting an offset of an output ofsaid detection unit by adjusting an attenuation amount of the adjustor.25. An angular velocity sensor as recited in claim 20 , wherein saidadjustor or injector includes a t emperature sensitive element forcompensating for temperature dependence of the signal synchronized withsaid driving signal.
 26. An angular velocity sensor as recited in claim20 , further including a compensating unit for electrically compensatingfor an electrostatic coupling signal generated in an area around thevibrating part and detection part of said sensor element, by using aquasi-drivin g signal.
 27. An angular velocity sensor as recited inclaim 20 , further including terminals to monitor the driving signalfrom said driver circuit and an output signal from the detection part ofsaid sensor element for adjusting.
 28. An angular velocity sensor asrecited in claim 26 , further including a stop unit for stopping thedriving of said sensor element.
 29. An angular velocity sensorcomprising: a sensor element including a vibrating part and a detectorpart for detecting an angular velocity; a driver circuit supplying adriving signal to the vibrating part of said sensor element; a monitorcircuit receiving a monitor signal outputted from said sensor element; adrive unit for generating stable self vibration in the vibrating part ofsaid sensor element; a control unit for stopping said self vibration; asignal generator for applying an adjusting signal to the vibrating partof said sensor element during a working state of said control unit; apair of charging amplifiers or current amplifiers receiving an outputfrom said detection part; a detection unit including a synchronousdemodulator, said synchronous demodulator demodulates an output fromsaid pair of charging amplifiers or current amplifiers in synchronouswith a driving signal from said drive unit and outputs anangularvelocity signal; and an adjusting unit for adjusting anelectrostatic coupling signal generated in an area around the vibratingpart and detection part of said sensor element by coupling a drivingsignal from said drive unit to a circuit, said circuit having an outputcoupled to said synchronous demodulator.
 30. An angular velocity sensoras recited in claim 29 , wherein said adjusting unit comprises anattenuator for adjusting a signal synchronized with said driving signal,and a capacitor for coupling an output signal from said attenuator to acircuit, said circuit having an output coupled to said synchronousdemodulator.
 31. An angular velocity sensor as recited in claim 29 ,wherein said control unit comprises a switch disposed in a loop of saiddrive unit.
 32. An angular velocity sensor as recited in claim 29 ,wherein frequency of said adjusting signal from said signal generatordiffers from the frequency of characteristic vibration mode of saidsensor element.
 33. An angular velocity sensor as recited in claim 30 ,wherein said capacitor is integrated in a semiconductor integratedcircuit, said integrated circuit comprises said drive unit and detectionunit.
 34. An angular velocity sensor as recited in claim 30 , whereinsaid attenuator is capable of adjusting a level of attenuation.
 35. Anangular velocity sensor as recited in claim 30 , wherein said attenuatorcomprises an amplifier having variable gain.
 36. An angular velocitysensor as recited in claim 30 , wherein said attenuator comprises aphase shifter having variable phase shift.
 37. An angular velocitysensor as recited in claim 30 , wherein said attenuator includes adigital adjusting unit, said digital adjusting unit is capable ofadjusting the level of attenuation stepwise based on a predetermineddigital data.
 38. An angular velocity sensor as recited in claim 6 ,further including a balancing unit, wherein said balancing unit isdisposed at an input terminal of one of said pair of charging amplifiersor current amplifiers and said input terminal is not connected to saidinjector, in order to keep a balance of input characteristics betweeneach of said pair of charging amplifiers or current amplifiers.
 39. Anangular velocity sensor as recited in claim 29 , wherein said drivercircuit includes a generation unit to generate a pair of signals fordriving said sensor element, the phases of said pair of signals areinverse to each other, and wherein said sensor includes a selector forselecting either of said pair of signals and supplying it to saidadjusting unit.
 40. An angular velocity sensor as recited in claim 29 ,further including a selector, said selector selects either of saiddriving signal or monitor signal whereby the selected signal is suppliedto said adjusting unit.
 41. Anangularvelocitysensorcomprising: a sensorelement including a driver part and a detector part; a drive unit forsupplying a driving signal to the driver part of said sensor element;and a synchronous demodulator, wherein said synchronous demodulatordetects an output from said detector part of said sensor element insynchronous with the driving signal from said drive unit, and outputs anangular velocity signal.
 42. An angular velocity sensor of claim 41 ,further comprising: a self diagnosis unit for outputting a diagnosissignal to detect an abnormality of said sensor element by coupling asignal synchronized with said driving signal to a circuit, said circuithaving an output coupled to said synchronous demodulator.